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SPA – Surface Profile Analyzer (표면 거칠기 분석기)
ㆍ제조사명 : Dataphysics
ㆍ가격 : 전화문의 (02-3143-2740)
ㆍ카다로그 : SPA_EN.pdf

Utilising the industry leading MountainsMap® Imaging Topography software provides a comprehensive set of tools for the analysis of the studied surface.

SPA - Surface Profile Analyzer
SPA-25.jpg

The Surface Profile Analyzer SPA 25 can measure surface topography and roughness parameters with exceptional speed and resolution. In the following you will learn about the possibilites that surface profile analysis offers and how the white-light interferometry enables the SPA 25 to achieve a height resolution of down to 0.1 nm.


Surface profile analysis

Utilising the industry leading MountainsMap Imaging Topography software provides a comprehensive set of tools for the analysis of the studied surface.

The SPA 25 can be used to create 3D maps of large surface areas (up to 300 mm x 300 mm with automated sample table) and e.g. detect defects caused by material processing and treatment or the surface roughness can be analysed according to various industry standards like ISO 25178, ISO 4287, ISO 13565, ISO 16610, etc.

Using the SPA 25 in combination with an optical contact angle measuring and contour analysis system of the OCA series provieds further insight into surface properties by e.g. determining the surface corrected contact angle according to the Wenzel theory.

With its high resolution even the small particle deposits created by dosing individual picoliter sized ink droplets with a DataPhysics Instruments picoliter dosing system PDDS can be analysed.



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Surface profle of deposited and dried silver ink picoliter droplets

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Surface profile of a grinding surface roughness standard

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Surface profile of a milling surface roughness standard

White-light interferometry
 
The Surface Profile Analyzer SPA 25 utilises the white-light interferometry for studying the surface topography. White-light interferometry is an optical measuring technique and due to the relatively large distance between measuring instrument and test surface there is no danger of damaging the sample compared to profiling systems that rely on some sort of stylus. 

The SPA 25 uses Mirau objectives which contain abeam splitter and reference mirror within the light pathway. The lightreflected from the sample surface and the light reflected within the objectiveitself create an interference image. The interference pattern has its highestcontrast when the sample is exactly in the focus plane of the objective andbecomes less intense closer/further away from the focus plane.

When the distance between sample and Mirau objectiveis changed the interference pattern changes correspondingly. The SPA 25changes the distance between sample surface and the objective with apiezoelectric precision scan drive. By sampling various distances and analysingthe changing interference pattern the height of every point in the frame can becalculated.

The increased amount of available parallel computationpower provided by modern graphics cards enables highly sophisticated evaluationalgorithms. Hence the SPA 25 can process up to 500 GByte of image datawith each scan and provide a height resolution of down to 0.1 nm usingthe extended phase shift interferometry (EPSI) scan mode.

A significant advantage of white-light interferometrycompared to other optical height resolving methods like focus variation orconfocal microscopy is that the height (Z-direction) resolution is independentof the magnification factor of the used objective. The magnification factoronly changes the lateral (X-Y-direction) resolution.

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Schematic design and scanning procedure of SPA 25

 
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 Schematic design of a Mirau objective

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Height resolution / systemnoise for different magnification factors and measurement techniques


The SPA 25 utilises the white-light interferometry, technique that features a height resolution of down to 0.1 nm even with smallmagnification factors. It can be used with either a manual or a motorised automatic sample table.

Using a motorised sample table enables software controlledimage stitching which combines multiple individual scans hence, larger areas of up to 300 mm x 300 mm can be visualised and analysed.


Main features

- white-light interferometry measurementtechnique

- precision piezoelectric scan drivewith gauge control

- up to 400 μm scan range(z-direction) and 11.3 μm/s scan speed at full resolution

- USB 3 high speed camera with 1920 x1200 pixel max. resolution and up to 3000 frames/s with restricted ROI

- two scan modes:

VSI (vertical scanning interferometry)with 1 nm height resolution

EPSI (extended phase shiftinterferometry) with 0.1 nm height resolution

- Mirauinterferometermicroscope objectives with different magnificationfactors

manual or automaticsample table

- control unit with integrated powerfulPC:


Software

The SPA25 is controlledvia the SPS 25 Surface Profile Software. It uses the industry leadingMountainsMap® Imaging Topography evaluation software to analyse the surfaceprofile.